Mesoporous nanoparticle TiO2 thin films for conductometric gas sensing on microhotplate platforms |
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| Affiliation: | 1. State Key Lab of New Ceramic and Fine Processing, School of Materials Science & Engineering, Tsinghua University, Beijing 100084, China;2. Key Lab of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China;3. Department of Engineering Physics, Tsinghua University, Beijing 100084, China;1. College of Mechanical and Power Engineering, Nanjing Tech University, Nanjing 211816, PR China;2. College of Mechanical Engineering, Nanjing Institute of Technology, Nanjing 211167, PR China;3. Sany Group Co., Ltd., Suzhou 215300, PR China;1. Department of Mechanical Engineering, National Kaohsiung University of Science and Technology, Kaohsiung, 807, Taiwan;2. Department of Greenergy, National University of Tainan, Tainan, 701, Taiwan;3. Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan, 710, Taiwan |
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| Abstract: | Mesoporous TiO2 nanoparticle thin films were prepared on MEMS microhotplate (μHP) platforms and evaluated as high-sensitivity conductometric gas sensor materials. The nanoparticle films were deposited onto selected microhotplates in a multi-element array via microcapillary pipette and were sintered using the microhotplate. The films were characterized by optical and scanning electron microscopies and by conductometric measurements. The thin films were evaluated as conductometric gas sensors based on the critical performance elements of sensitivity, stability, speed and selectivity. The nanoparticle films were compared with compact TiO2 films deposited via chemical vapor deposition (CVD) and the nanoparticle films were found to demonstrate higher sensitivity to target analytes. The nanoparticle films were also stable with regard to both baseline conductance and signal response over 60 h of continuous operation at high temperatures (up to 475 °C). Sensor response times were evaluated and the TiO2 nanoparticle films showed fast responses to the presence of analyte (≈5 s) and a response-time dependence on the analyte concentration. Control of the sensor operating temperature, an inherent benefit of the microhotplate platform, was employed to demonstrate the selectivity of the nanoparticle films. |
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