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Nucleation and growth of amorphous carbon film on tungsten-implanted stainless steel substrates
Affiliation:1. School of Materials Science and Engineering, Shanghai Jiao Tong University, Shanghai 200030, China;2. 702 Department, Mechanical Engineering School of Beijing University of Aeronautic and Astronautic, 100083, China;3. Department of Physics & Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong;1. School of Material Science and Engineering, China University of Mining and Technology, Xuzhou 221116, China;2. School of Information and Electrical Engineering, China University of Mining and Technology, Xuzhou 221116, China;1. Key Laboratory for Ultrafine Materials of Ministry of Education, School of Materials Science and Engineering, East China University of Science and Technology, Shanghai 200237, China;2. Department of Chemistry, Ångström Laboratory, Uppsala University, Lägerhyddsvägen 1, Box 538, Uppsala 75121, Sweden;1. Advanced Photonics Center, School of Electronic Science and Engineering, Southeast University, Nanjing, 210096, Jiangsu, China;2. State Key Laboratory of Energy Thermal Conversion and Control of Ministry of Education, School of Energy and Environment, Southeast University, Nanjing, 210096, Jiangsu, China;1. School of Biological and Chemical Engineering, Anhui Key Laboratory of Spin Electron and Nanomaterials, Suzhou University, Suzhou 234000, PR China;2. Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, PR China
Abstract:Amorphous carbon (a-C) films were deposited on W-implanted (20 kV, 3 × 1017 ions cm? 2) and un-implanted steel substrates by plasma immersion ion implantation and deposition (PIII&D). The W implantation pretreatment changes the surface structure and impacts film nucleation. Consequently, the growth mechanism of the a-C film is altered resulting in different surface morphologies and roughnesses even though the films deposited on the un-implanted steel substrates possess similar a-C structures as revealed by Raman spectroscopy. The structural differences are probed by X-ray photoelectron spectroscopy and X-ray diffraction. Moreover, microstructural observations were carried out by transmission electron microscopy. A model based on the statistical formation theory is proposed to explain the growth of the a-C films on the implanted and un-implanted substrates.
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