| 直流磁控溅射Ni49.54Mn29.59Ga20.87磁驱动记忆合金薄膜的XPS研究 |
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| 引用本文： | 高来勖,刘超,高智勇,安旭,蔡伟,赵连城. 直流磁控溅射Ni49.54Mn29.59Ga20.87磁驱动记忆合金薄膜的XPS研究[J]. 功能材料, 2007, 38(1): 50-52 |
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| 作者姓名： | 高来勖 刘超 高智勇 安旭 蔡伟 赵连城 |
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| 作者单位： | 1. 黑龙江大学,电子工程黑龙江省高校重点实验室,黑龙江,哈尔滨,150080
2. 哈尔滨工业大学,材料科学与工程学院,黑龙江,哈尔滨,150001 |
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| 摘 要： | 采用直流磁控溅射技术沉积了Ni49.54Mn29.59Ga20.87磁驱动形状记忆合金薄膜.XRD结果表明,Ni49.54Mn29.59Ga20.87薄膜室温下为5层调制型结构马氏体.X射线光电子能谱(XPS)分析表明,放置于空气中2个月的沉积态薄膜表面吸附少量氧和碳杂质.随Ar 刻蚀深度的增加,表面C杂质易被剥蚀掉,而部分氧杂质以MnO状态存在;Ni、Mn、Ga元素含量由薄膜表面向内层逐渐增加,化学价由正价向零价转变.
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| 关 键 词： | Ni-Mn-Ga 磁驱动形状记忆合金 薄膜 溅射 |
| 文章编号： | 1001-9731(2007)01-0050-03 |
| 修稿时间： | 2006-07-12 |
XPS study of Ni49.54Mn29.59Ga20.87 magnetically driven shape memory alloy thin film fabricated by D. C magnetron sputtering technique |
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| GAO Lai-xu,LIU Chao,GAO Zhi-yong,AN Xu,CAI Wei,ZHAO Lian-cheng. XPS study of Ni49.54Mn29.59Ga20.87 magnetically driven shape memory alloy thin film fabricated by D. C magnetron sputtering technique[J]. Journal of Functional Materials, 2007, 38(1): 50-52 |
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| Authors: | GAO Lai-xu LIU Chao GAO Zhi-yong AN Xu CAI Wei ZHAO Lian-cheng |
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| Affiliation: | 1. HLJ Province Key Lab of Senior-Education for Electronic Engineering HLJ University, Harbin 150080, China 2. School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China |
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| Abstract: | Ni_(49.54)Mn_(29.59)Ga_(20.87) magnetically driven shape memory alloy thin film has been deposited on silicon substrates by means of D.C magnetron sputtering technique.XRD pattern shows that the thin film is five-layered martensite phase at room temperature.The surface characteristics of the thin film are also investigated by X-ray electron spectroscopy(XPS).The results show that the film surface absorbs lots of O and C when it was put into air for 2months.With the increasing of Ar~+ sputtering depth,the contaminations of C element can be removed,but contaminations of O formed MnO exist in the film.The contents of Ni,Mn and Ga are increasing from the surface to inside,along with the transition from the ionic bonded atom to metal atom. |
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| Keywords: | Ni-Mn-Ga magnetically driven shape memory alloy thin film sputtering |
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