Tunable MEMS LC resonator with large tuning range |
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| Authors: | Yu A.B. Liu A.Q. Zhang Q.X. |
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| Affiliation: | Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore; |
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| Abstract: | A tunable resonator based on MEMS technology is reported. The resonator is a parallel LC type resonator, in which the capacitor is made up of two metal bridges and the inductor is made up of a shorted stub. The length of the shorted stub is changed by shunt DC contact switches and therefore inductance values of the resonator can be varied. As a result, the resonant frequency of the resonator can be shifted from 8 to 14 GHz with 75% tunable range. The whole size of the resonator is 6/spl times/0.9 mm/sup 2/. |
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