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未确认Mura分析及改善对策
引用本文:徐伟,彭毅雯,肖光辉.未确认Mura分析及改善对策[J].液晶与显示,2011,26(5):612-615.
作者姓名:徐伟  彭毅雯  肖光辉
作者单位:1. 清华大学电子工程系,北京,100084;北京京东方光电科技有限公司,北京,100176
2. 北京京东方光电科技有限公司,北京,100176
摘    要:未确认Mura是一种能够影响TFT-LCD画面品质的不良。文章对未确认Mura不良进行了详细的分析,认为扇形区域出现有源层残留是导致未确认Mura不良发生的原因,介绍了一种通过变更曝光工艺条件来解决此种不良的方法,并通过试验论证了此方法的量产可行性。

关 键 词:未确认Mura  扇形区域  有源层残留  曝光工艺条件

Analysis and Improvement of Unknown Mura
XU Wei,PENG Yi-wen,XIAO Guang-hui.Analysis and Improvement of Unknown Mura[J].Chinese Journal of Liquid Crystals and Displays,2011,26(5):612-615.
Authors:XU Wei  PENG Yi-wen  XIAO Guang-hui
Affiliation:XU Wei1,2,PENG Yi-wen1,XIAO Guang-hui2(1.Department of Electronic Engineering,Tsinghua University,Beijing 100084,China,2.Beijing BOE Optoelectronics Technology Co.Ltd.,Beijing 100176,China)
Abstract:As to the TFT-LCD and other display monitors,Mura is a relatively normal defect which will degrade the display quality greatly.The analysis of the unknown Mura,indicated that the active remain in the Fan-out area are the main reason of the unknown Mura,and a novel method is introduced to solve this defect by changing the condition of Photo process.The mass production feasibility of this method has been demonstrated through experimentation.
Keywords:unknown Mura  fan-out area  active remain  exposure condition  
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