| 激光诱导SiH4等离子体反应碎片的产生机制 |
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| 作者单位： | ： |
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| 摘 要： |
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| 关 键 词： | SiH |
| 修稿时间： | 1998-11-11 |
Study on productionprocess of fragment in SiH4 plasma induced by TEA CO2 laser |
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| Abstract: | Using the technique of optical emissionspectroscopy,time-dependence of fragment in SiH4 laser plasma is measured.Afteranalyzing the evolution and reaction progress of fragments,we proposed that si.H and si+were the first reaction products,but Si2 SiH and Si2+ the secondones.This conclusion is further verified by the experimental results of Si390.6nm andSiH412.8nm emission lines in various conditions. |
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