| 浸渍涂布法制备ITO气敏薄膜 |
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| 引用本文： | 祁志美 张耀华. 浸渍涂布法制备ITO气敏薄膜[J]. 传感器与微系统, 1994, 0(4): 18-21 |
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| 作者姓名： | 祁志美 张耀华 |
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| 作者单位： | 中科院合肥智能机械研究所(祁志美，张耀华，李民强)，中科院合肥智能机械研究所(唐红霖) |
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| 摘 要： | 利用含In,Sn成分的水溶液,经浸渍涂布工艺在不同衬底上制备了ITO薄膜(掺Sn的In_2O_3薄膜)。采用XRD、XPS、SEM分析了薄膜的结构,成分和表面形貌;测试薄膜的气敏特性,发现其对NO_2有良好的选择性和灵敏度,而且薄膜显示出长时间良好的工作稳定性,可望制成实用的NO_2敏感元件。
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| 关 键 词： | 浸渍涂布工艺 ITO薄膜 气敏特性 |
ITO Gas Sensitive Thin Films Prepared By a Dip-Coating Method |
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| Qi Zhimei Zhang Yaohua Li Minqiang Tang Honglin. ITO Gas Sensitive Thin Films Prepared By a Dip-Coating Method[J]. Transducer and Microsystem Technology, 1994, 0(4): 18-21 |
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| Authors: | Qi Zhimei Zhang Yaohua Li Minqiang Tang Honglin |
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| Abstract: | ITO thin films were prepared by a dip - coating method using a aqueous solution containing In and Sn elements. Structure, composition and surface morphology of the thin films were examined by XRD, XPS and SEM respectively. The gas sensitive properties of the thin films were investigated and the results indicated that the thin films had a good selectivity and a high sensitivity to NO_2 and their resistances were very steady. |
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| Keywords: | Dip-coating method ITO thin film Gas sensitive properties |
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