Properties of GaSb Substrate Wafers for MOCVD Ⅲ-Ⅴ Antimonids |
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作者姓名: | 彭瑞伍 丁永庆 徐晨梅 王占国 |
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作者单位: | Peng Ruiwu,Ding Yongqing and Xu ChenmeiShanghai Institute of Metallurgy,Chinese Academy of Sciences,Shanghai 200050,China Wang ZhanguoInstitute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China |
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摘 要: | 1IntroductionTheGaSbsinglecrystalsareoftenusedasthesubstratematerialsforpreparingepilayersoflightemitingandlightdetectingd...
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