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Vacuum‐Assisted Aerosol Deposition of a Low‐Dielectric‐Constant Periodic Mesoporous Organosilica Film |
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| Authors: | Wendong Wang Daniel Grozea Ara Kim Douglas D. Perovic Geoffrey A. Ozin |
| Affiliation: | 1. Materials Chemistry Research Group Chemistry Department, University of Toronto 80 St. George Street Toronto, Ontario, M5S 3H6 (Canada);2. Department of Materials Science and Engineering University of Toronto 184 College Street Toronto, Ontario, M5S 3E4 (Canada) |
| Abstract: | |
| Keywords: | mesoporous materials organosilica self‐assembly thin films |