基于半导体光电位置敏感器件厚度检测仪研制

首先分析了光线通过薄膜的理论及特点,在此基础上,采用透镜、分束棱镜、滤光片以及新型半导体光电位置敏感器件,设计了一种新型透明体厚度光电检测仪。该仪器中的光学系统设计,采用双光路消漂移方法,消除了光束的漂移等不稳定因素;信号处理电路采用高精度、低温漂放大器等元器件,最大程度地消除了热噪声;对入射光线、被测体、探测器三者之间的相对位置进行了最优化设计。最后,对该仪器的结构、特点以及产生的误差进行了分析,给出了几个重要结论。

Development of Thickness Detector Based on Position Sensitive Devices

Firstly the theory and characteristics of light passing the film are analysed.Then,designed is a new type of photoelectric clarity body thickness detection instrument including several components,such as lens,a splitting prism,a filter,a new photoelectric detector.The instrument uses a double optical pass dispel excursion method for the optical system design,eliminating light excursion.And the signal processing circuit applies the drift amplifier with characteristics of high precision and low temperature,el...