| 溅射技术在SiC薄膜沉积中的应用和工艺研究进展 |
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| 引用本文： | 梅芳,弓满锋,李玲.溅射技术在SiC薄膜沉积中的应用和工艺研究进展[J].表面技术,2008,37(2):75-78. |
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| 作者姓名： | 梅芳 弓满锋 李玲 |
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| 作者单位： | 湛江师范学院物理系,广东,湛江,524048;湛江师范学院物理系,广东,湛江,524048;西北工业大学超高温结构复合材料国家重点实验室,陕西,西安,710072 |
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| 基金项目： | 湛江师范学院校科研和教改项目 |
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| 摘 要： | 近年来,国内外SiC薄膜材料制备工艺研究迅速发展,由此带来SiC薄膜性能方面的研究也获得长足的进步,新技术、新工艺、新性能不断涌现.溅射SiC技术相对于其它沉积技术(CVD、PIP等)有许多独特的优点:沉积温度低、结合性和致密性好、表面平整、硬度高、光电性能优异以及工艺安全环保等,因此越来越受到重视,且已经成为沉积高性能SiC薄膜的重要技术方法.主要论述了几种不同溅射技术,着重介绍了溅射技术在SiC薄膜制备中的研究进展及SiC薄膜性能方面的研究进展和应用,并且展望了溅射技术制备SiC薄膜的发展前景和当前热点研究领域.
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| 关 键 词： | 溅射技术 SiC薄膜 进展 |
| 文章编号： | 1001-3660(2008)02-0075-04 |
| 收稿时间： | 2007/10/17 0:00:00 |
| 修稿时间： | 2007年10月17 |
Application and Technologic Progress of Sputtering for the SiC Coating |
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| MElfang,GONG Man-feng and LI Ling.Application and Technologic Progress of Sputtering for the SiC Coating[J].Surface Technology,2008,37(2):75-78. |
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| Authors: | MElfang GONG Man-feng and LI Ling |
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| Affiliation: | Institute of Material Physics and Chemistry, Zhanjiang Normal College, Zhanjiang 524048, China,1. Institute of Material Physics and Chemistry, Zhanjiang Normal College, Zhanjiang 524048, China;2. National Key Laboratory of Thermostructure Composite Materials,Northwestem Polytechnical University, Xian 710072, China and Institute of Material Physics and Chemistry, Zhanjiang Normal College, Zhanjiang 524048, China |
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| Abstract: | In recent years, the deposited technologies of SiC coatings have made great progress, which makes great development for the study of the property of SiC coatings , the new technology and the new property emerge continually. Comparing with the other technologies ( CVD and PIP) , the sputtering technology has many profits : the low deposited temperature, high adhesive strength and compaction, smooth surface, enhanced hardness, enhanced optics and electrics characteristic and soft-environmental, so it has been focused on depositing the SiC coatings more and more. The theory and deposited technology about several sputtering technologies were discussed; the sputtering-technologic progress, characteristic and application of SiC coatings were emphasized; and the developing foreground and the hotspots about the sputtering SiC coating were expected. |
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| Keywords: | Sputtering SiC coating Progress |
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