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An analysis of the initial oxidation regions of silicon in dry oxygen at atmospheric pressure |
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| Authors: | C. Pavelescu M. Badila C. Cobianu |
| Affiliation: | (1) R & D Center for Semiconductors (CCSIT-CE), Str. Erou Iancu Nicolae 32 B, R-72996 Bucharest, Romania;(2) Microelectronica, Str. Erou Iancu Nicolae 34 B, R-72996 Bucharest, Romania |
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