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两端绞紧微板弛豫动态过程分析
引用本文:彭首军,冯庆玉,龚胜平. 两端绞紧微板弛豫动态过程分析[J]. 西安邮电学院学报, 2012, 17(5): 84-88
作者姓名:彭首军  冯庆玉  龚胜平
作者单位:1. 西安工业大学理学院,陕西西安,710032
2. 国家卫星气象中心北京地面站,北京,100055
3. 中国地质科学院地球物理地球化学勘查研究所,河北廊坊,065000
摘    要:为探讨微机电系统中平板结构弛豫动力学特性,基于Euler-Bernoulli方程,计入空气滑膜阻尼与压膜阻尼对微板弛豫过程的影响,导出两端绞紧微板挠度弛豫表达式,并给出临界阻尼、过阻尼及欠阻尼时微板弛豫Ma-ple算例。利用ANSYS对微板临界阻尼、过阻尼以及欠阻尼弛豫进行仿真,结果显示不同长宽比微板仿真数据均与理论计算符合较好。

关 键 词:Euler-Bernoulli方程  微板  空气阻尼  弛豫

Relaxation dynamic process analysis of micro-plate with two hinged ends
PENG Shoujun,FENG Qingyu,GONG Shengping. Relaxation dynamic process analysis of micro-plate with two hinged ends[J]. Journal of Xi'an Institute of Posts and Telecommunications, 2012, 17(5): 84-88
Authors:PENG Shoujun  FENG Qingyu  GONG Shengping
Affiliation:1.School of Science,Xi’an Technological University,Xi’an 710032,China; 2.Beijing Station,China National Satellite Meteorological Center,Beijing 100055,China; 3.Institute of Geophysical and Geochemical Exploration,Chinese Academy of Geological Science,Langfang 065000,China)
Abstract:In order to explore micro-plate relaxation dynamics characteristic,the deflection relaxation expression of micro-plate with two hinged ends was educed based on Euler-Bernoulli equation considering air slide-film and squeeze-film damping effect.Numerical examples of micro-plate deflection relaxation process under critical-damping,over-damping and under-damping were calculated by Maple.Micro-plate relaxation process under critical-damping,over-damping and under-damping were simulated by ANSYS.Simulation result indicates that simulation data of micro-plates with different length-width ratio conform to theoretical calculation.
Keywords:Euler-Bernoulli equation  micro-plate  air damping  relaxation
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