Time delay effects on performance and stability of a low cost electrostatic suspension system |
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Authors: | Truyen The Le and Jong Up Jeon |
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Affiliation: | (1) Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Research Institute of Micro/Nanometer Science and Technology, Shanghai Jiaotong University, 200240 Shanghai, China;(2) Faculty of Electronics and Information, Zhaoqing University, 526061 Zhaoqing, China |
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Abstract: | To expand the potential industrial applications of electrostatic suspension systems, a low cost suspension system with high-voltage
supplies instead of high-voltage amplifiers has already been implemented. In that system, the performance and stability are
strongly affected by the time delay inherent in the system. It is therefore important to understand the sensitivity of stability
and performance in relation to the time delay. In this paper a low cost electrostatic suspension system based on a delay controller
is presented. The effect of time delay on the characteristics of the suspension system will be investigated. The critical
time delay of the suspension system, defined as the maximum time delay that can be accepted by the system in order to ensure
the system stability, will be derived in terms of bias voltage. The recoverable set whose domain depends on time delay will
be found as well. The simulation and experimental results will show the effectiveness of the proposed method. In the experiments,
a 3.5-inch aluminium disk was suspended without any mechanical contact at a reference gap length of about 300 μm in both atmospheric
and vacuum environments. |
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