| 溶胶－凝胶法制备薄膜湿敏元件的研究 |
| |
| 引用本文： | 王天宝,冯宝康,王列娥,吴怀良.溶胶－凝胶法制备薄膜湿敏元件的研究[J].无机材料学报,1995(3). |
| |
| 作者姓名： | 王天宝 冯宝康 王列娥 吴怀良 |
| |
| 作者单位： | 中国科学院上海硅酸盐研究所 |
| |
| 摘 要： | 用溶胶－凝胶法制备了Ｒ２Ｏ－Ａｌ２Ｏ３－ＳｉＯ２系（Ｒ＝Ｌｉ，Ｎａ，Ｋ）薄膜湿敏元件，研究了它们的感湿特性，对薄膜的结构、导电机理进行了讨论．获得的湿敏元件具有响应快、滞后小和灵敏度高等优点．
|
| 关 键 词： | 湿敏元件，薄膜湿敏材料，溶胶－凝胶法 |
Film Humidity Sensor Prepared by Sol-Gel Method |
| |
| Wang Tianbao, Feng Baokang, Wang Lie'e, Wu Huailiang.Film Humidity Sensor Prepared by Sol-Gel Method[J].Journal of Inorganic Materials,1995(3). |
| |
| Authors: | Wang Tianbao Feng Baokang Wang Lie'e Wu Huailiang |
| |
| Abstract: | Film humidity sensors of R2O-Al2O3-SiO2 system (R: Li, Na, K) were prepared by the sol-gel method, their humidity sensitive properties and the structure of the film were investigated, and conductive mechanism was discussed. The obtained humidity sensor of K2O-Al2O3-SiO2 system possessed very rapid response, small hysteresis and high sensitivity. |
| |
| Keywords: | humidity sensor film humidity sensitive material sol-gel method |
| 本文献已被 CNKI 等数据库收录！ |
|
