| 多层薄膜气敏材料研究概况 |
| |
| 引用本文： | 焦正,张辉华.多层薄膜气敏材料研究概况[J].功能材料,1998,29(5):458-461. |
| |
| 作者姓名： | 焦正 张辉华 |
| |
| 作者单位： | 中国科学院合肥智能机械研究所!合肥，230031，中国科学院合肥智能机械研究所!合肥，230031 |
| |
| 摘 要： | 总结了国内外近年来多层落膜气敏材料的研究状况，对研究结果进行了综合分析和比较，总结了一些多层薄膜的制备方法及气敏性能的优缺点，并对多层薄膜材料性能比单层薄膜有明显改善的原因做了初步探讨。在此基础上提出了多层薄膜敏材料研究方向的看法。
|
| 关 键 词： | 多层薄膜 气敏材料 薄膜制备 |
Review of Multilayer Thin Film Gas Sensor |
| |
| Jiao Zheng, Zhang Yaohua.Review of Multilayer Thin Film Gas Sensor[J].Journal of Functional Materials,1998,29(5):458-461. |
| |
| Authors: | Jiao Zheng Zhang Yaohua |
| |
| Abstract: | The progress of investigation for multilayer gas sensitive materials in recent years was reviewed,the reasearch results from references wwere analysed, and some special points in processing and gas sensitive character of multilayer thin film were given in this paper, The reason that multilayer film opssessed a better gas sensitive character was discussed. Finally the research direction of multilayer film was emphasized. |
| |
| Keywords: | multilayer thin film gas sensitive materials |
| 本文献已被 CNKI 维普 等数据库收录！ |
