| 适用于微纳流控芯片对准连接的微装配系统 |
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| 引用本文： | 徐征,王德佳,刘云亮,王俊尧,刘冲.适用于微纳流控芯片对准连接的微装配系统[J].微纳电子技术,2011,48(3):194-198. |
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| 作者姓名： | 徐征 王德佳 刘云亮 王俊尧 刘冲 |
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| 作者单位： | 大连理工大学辽宁省微纳米技术及系统重点实验室,辽宁,大连,116024 |
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| 基金项目： | 国家高技术研究发展计划(863计划)资助项目，国家自然科学基金项目( |
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| 摘 要： | 针对微纳流控芯片等器件的对准装配问题,分析了具体操作要求,建立了一套包含显微光学观测单元、机械进给调整和器件吸取一放置等的微装配系统,采用暗场照明观测微纳结构,高精度移动平台精确调整基片与盖片之间的角度与位置,利用真空吸附的方法抓取和释放.采用该系统成功地制造了多种可用的微纳流控芯片,以玻璃微纳流控芯片的对准装配为示范...
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| 关 键 词： | 微装配 微纳流控芯片 对准 暗场照明 真空吸附 |
Micro-Assembly System for the Alignment of Micro-Nanofluidic Chips |
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| Xu Zheng,Wang Dejia,Liu Yunliang,Wang Junyao,Liu Chong.Micro-Assembly System for the Alignment of Micro-Nanofluidic Chips[J].Micronanoelectronic Technology,2011,48(3):194-198. |
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| Authors: | Xu Zheng Wang Dejia Liu Yunliang Wang Junyao Liu Chong |
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| Affiliation: | Xu Zheng,Wang Dejia,Liu Yunliang,Wang Junyao,Liu Chong(Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology,Dalian 116024,China) |
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| Abstract: | Aimed to the alignment problems of micro-nanofluidic chips,the specific requirements of micro-assembly were analyzed.A micro-assembly system was developed,including the micro-optical observation unit,mechanical feeding unit and pick-and-place operation unit,etc.The dark-field illumination was used to observe micro-nano structures,high-precision mobile platform was used to adjust accurately the angles and positions between the bottom plate and top plate,and picking up and placing down the top plate was accom... |
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| Keywords: | micro-assembly micro-nanofluidic chip alignment dark-field illumination vacuum suction |
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