| MEMS微加速度与微角速率集成传感器的研制 |
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| 引用本文： | 吕树海,杨拥军,徐淑静,张旭辉.MEMS微加速度与微角速率集成传感器的研制[J].微纳电子技术,2011,48(3):189-193. |
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| 作者姓名： | 吕树海 杨拥军 徐淑静 张旭辉 |
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| 作者单位： | 中国电子科技集团公司,第十三研究,石家庄,050051 |
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| 摘 要： | 介绍了一种全新的MEMS微型惯性器件,该器件是一种基于热对流原理的热膜式传感器,它利用一个单敏感元件同时测量加速度和角速率。该器件由一个加热器和两组微型温度传感器组成,加热器加热气体形成的热对流气体作为敏感元件,该器件通过微型温度传感器测得的热对流气体的温度差实现加速度和角速率的测量。分析了器件的工作原理,根据仿真结果设计了双层的器件结构,进行了工艺开发,加工出了原理样机。测试表明:该器件同时具备了加速度传感器和角速率传感器的检测功能,很好地验证了设计的可行性。
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| 关 键 词： | 微电子机械系统(MEMS) 温度传感器 加速度 角速率 热对流 |
Research on MEMS Micro Transducers Integrated with Accelerometers and Gyroscopes |
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| Lü Shuhai,Yang Yongjun,Xu Shujing,Zhang Xuhui.Research on MEMS Micro Transducers Integrated with Accelerometers and Gyroscopes[J].Micronanoelectronic Technology,2011,48(3):189-193. |
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| Authors: | Lü Shuhai Yang Yongjun Xu Shujing Zhang Xuhui |
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| Affiliation: | Lü Shuhai,Yang Yongjun,Xu Shujing,Zhang Xuhui(The 13th Research Institute,CETC,Shijiazhuang 050051,China) |
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| Abstract: | A novel MEMS micro inertial device integrated with accelerometers and gyroscopes was presented.The sensor based on the principle of heat convection can simultaneity measure the acceleration and angular rate with the single sensor component.The sensor is composed of a heater and two sets of micro temperature sensors.The heater can form heat convection by heating the gas as the sensing component,and the micro temperature sensors can measure the acceleration and angular rate.The sensor response of the accelera... |
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| Keywords: | microelectromechanical system(MEMS) temperature sensor acceleration angular rate heat convection |
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