Comparative analysis of the DC performance of DG MOSFETs on highly-doped and near-intrinsic silicon layers |
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Authors: | Nebojsa D Jankovic G.Alastair Armstrong |
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Affiliation: | a Department of Microelectronics, Faculty of Electronic Engineering Nis, University of Nis, Beogradska 14, 18000 Nis, Serbia and Montenegro Minor Yugoslavia b School of Electrical and Electronic Engineering, The Queen's University Belfast, Ashby Building, Stranmillis Road, Belfast BT9 5AH, UK |
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Abstract: | A comparison of dc characteristics of fully depleted double-gate (DG) MOSFETs with respect to low-power circuit applications and device scaling has been performed by two-dimensional device simulation. Three different DG MOSFET structures including a conventional N+ polysilicon gate device with highly doped Si layer, an asymmetrical P+/N+ polysilicon gate device with low doped Si layer and a mid-gap metal gate device with low doped Si layer have been analysed. It was found that DG MOSFET with mid-gap metal gates yields the best dc parameters for given off-state drain leakage current and highest immunity to the variation of technology parameters (gate length, gate oxide thickness and Si layer thickness). It is also found that an asymmetrical P+/N+ polysilicon gate DG MOSFET design offers comparable dc characteristics, but better parameter immunity to technology tolerances than a conventional DG MOSFET. |
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Keywords: | Double-gate Low-power circuit Silicon layers SOI |
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