| 叉指式微加速度计静电-机械耦合场分析 |
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| 引用本文： | 徐洪强,陈花玲. 叉指式微加速度计静电-机械耦合场分析[J]. 传感器与微系统, 2004, 23(7): 27-29,33 |
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| 作者姓名： | 徐洪强 陈花玲 |
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| 作者单位： | 西安交通大学,机械工程学院,陕西,西安,710049 |
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| 摘 要： | 为了分析叉指式微加速度计静电-机械耦合场,提出了一种近似分析方法。作为实例,分析了一种新型微加速度计的机 电耦合场对灵敏度的影响,所得结果与理论值比较一致,且计算精度接近于有限元分析方法,进一步计算表明:将该近似方法与有限元方法结合,不仅可以提高求解速度,还可以达到较高的精度。
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| 关 键 词： | 微加速度计 耦合场 有限元 |
| 文章编号： | 1000-9787(2004)07-0027-03 |
Analysis of coupled electrostatic-mechanical field for interdigital micro-accelerometer |
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| XU Hong-qiang,CHEN Hua-ling. Analysis of coupled electrostatic-mechanical field for interdigital micro-accelerometer[J]. Transducer and Microsystem Technology, 2004, 23(7): 27-29,33 |
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| Authors: | XU Hong-qiang CHEN Hua-ling |
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| Abstract: | A approximate analysis method has been developed to solve the problem of coupled electrostatic-mechanical analysis for interdigital micro-accelerometer. As an example, the effect of the coupled field on sensitivity of a new micro-accelerometer is analyzed, the result is compatible with the reality,and the accuracy is approaching to finit element method(FEM).Further research shows if the approximate analysis method and FEM are integrated, the result can be taken with less calculation and more precision. |
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| Keywords: | micro-accelerometer coupled field FEM (finite element method) |
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