| 衬底及生长工艺对Hg_1－_xCd_xTe液相外延薄膜的影响 |
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| 引用本文： | 朱基千,褚君浩,李标,陈新强,曹菊英,程继健. 衬底及生长工艺对Hg_1－_xCd_xTe液相外延薄膜的影响[J]. 功能材料, 1996, 0(6) |
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| 作者姓名： | 朱基千 褚君浩 李标 陈新强 曹菊英 程继健 |
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| 作者单位： | 中国科学院上海技术物理研究所红外物理国家实验室，华东理工大学无机材料系，上海建材学院材料测试中心 |
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| 摘 要： | 用扫描电子显微镜（ＳＥＭ）、能量散射Ｘ射线分析（ＥＤＸ）及Ｘ射线双晶摇摆曲线（ＤＣＲＣ）方法对衬底及Ｈｇ１－ｘＣｄｘＴｅ液相外延（ＬＰＥ）薄膜的生长表面进行了研究。发现采用生长前衬底表面覆盖、回熔ＬＰＥ生长措施，可以防止衬底沾污对液相外延层形貌的影响，大大改善Ｈｇ１－ｘＣｄｘＴｅ外延层的晶体质量
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| 关 键 词： | Hg1－xCdxTe 液相外延 晶体质量 |
Influence of Substrate and Growth Conditions on Hg 1-x Cd xTe Liquid Phase Epitaxial Films |
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| Zhu Jiqian ,, Chu Junhao Li Biao Chen Xinqiang Cao Juying Cheng Jijian. Influence of Substrate and Growth Conditions on Hg 1-x Cd xTe Liquid Phase Epitaxial Films[J]. Journal of Functional Materials, 1996, 0(6) |
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| Authors: | Zhu Jiqian Chu Junhao Li Biao Chen Xinqiang Cao Juying Cheng Jijian |
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| Affiliation: | Zhu Jiqian 1,2,3 Chu Junhao 1 Li Biao 1 Chen Xinqiang 1 Cao Juying 1 Cheng Jijian 2 |
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| Abstract: | Scanning electron microscope(SEM),energy dispersive X ray analysis(EDX)and X ray double crystal rocking curve(DCRC)were used to study the CdTe or CdZnTe substrates and Hg 1-x Cd xTe liquid phase epitaxial(LPE)films.The results showed that the morphology and quality of epi films depended upon the substrate quality,the substrate preparation,and the growth conditions.Quality substrate without grain boundary was the prerequisite for the production of perfect epi films.A protected coverage on the substrate during the homogenization period and the meltback LPE growth mode would be helpful to improve the surface morphology and quality. |
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| Keywords: | Hg 1-x Cd xTe liquid phase epitaxy crystalline quality |
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