简谐电压激励下静电谐波微电机的响应分析

提出了一种基于静电驱动的新型谐波微电机，描述了该微电机的基本工作原理。给出了微电机中静电场力的静态分量、动态分量和简谐电压激励下的载荷。将受迫振动的位移解表示为柔轮自由振动振型的级数形式，进而把按照Donnell壳理论建立的控制微分方程予以化简。利用壳体振型的正交性，确定了简谐电压激励下系统的动态响应，并总结了其规律。最后，分析了系统在电压激励下的共振特性，以及随主要系统参数的变化规律。  

Response to Harmonic Voltage Excitation for Electrostatic Harmonic Micromotor

A novel harmonic micromotor actuated by electrostatic force was proposed, whose basic operating principles were also described. The static and dynamic components of the electrostatic force and load due to the harmonic voltage excitation were derived for the micromotor. Displacement distribution for forced vibration was formulated as a series form of the mode shapes for free vibration. Furthermore, the governing differential equations based on the Donnell’s shell theory were simplified. In virtue of the orthogonality of shell modes, the dynamic response to harmonic voltage excitation was determined and its variation was summarized. Finally, resonance characteristic was analyzed for the system subjected to harmonic excitation. Its changes along with the main system parameters were also given.