Affiliation: | 1. Institut für Mikro- und Nanoelektronik, Technische Universität Ilmenau, PF 100565 Ilmenau, 98684 Ilmenau, Germany;2. X-FAB Semiconductor Foundries AG, Haarbergstr. 67, 99097 Erfurt, Germany;3. Dipartimento di Ingegneria dell’Informazione, Università di Pisa, Via Caruso 16, 56122 Pisa, Italy;1. Department of Applied Physics, The Hong Kong Polytechnic University, Hung Hom, Hong Kong, China;2. Lash Miller Chemical Laboratories, Department of Chemistry and Institute of Optical Sciences, University of Toronto, 80 Saint George Street, Toronto, Ontario, Canada, M5S 3H6;3. University Research Facility in Materials Characterization and Device Fabrication, The Hong Kong Polytechnic University, Hung Hom, Hong Kong, China |