小型微/纳米级三坐标测量机的研制

介绍一套低成本小型三维坐标测量机的研制过程，作为微/纳米级超精密测量设备，整体机台结构采用花岗岩材料；X／Y轴的移动平台利用压电材料摩擦驱动与挠性变形原理，长短两行程可达25mm范围及5nm的微位移，藉自行研发的衍射干涉激光尺，位置回馈测量系统可具有0．025nm的分辨率；测量探头在一般DVD光读取头的自动聚焦原理基础上改装，最佳分辨率可达2．5nm，该雏形机适于测量微机电组件、微型器件及膜厚等。

Development of a Small Coordinate Measuring Machine with Micro/Nano-Accuracy

The process of developing a small low cost coordinate measuring machine with micro/nano-accuracy is described. The machine body is constructed with granite elements of fixed bridge type. The X/Y working table is actuated by PZT friction drive for 25 mm long stroke motion. On the table top a small flexural monolithic table is driven by PZT for fine motion up to 5 nm step. The X/Y coarse motions are detected by the developed diffraction interference scales, which provide position feedback to the control system with 0. 025 nm resolution after signal interpolation. The measuring probe is based on the autofocusing principle modified from the commercial DVD pickup head with the best resolution to 2. 5 nm. This prototype CMM is suitable for small size measurements such as MEMS parts, micro-parts, thin films, etc.