微机械加工技术

微机械加工技术是发展微型固态集成传感器,微执行器和微机械构件的一种关键技术,它以硅作为基本材料,集合了精密腐蚀、薄膜生长、硅—绝缘体和硅—硅的键合技术、层间连接技术以及其它集成电路的典型工艺去制造各种三维以硅为基础的微机械和微型器件。本文重点介绍微机械加工的几种关键技术和我们的主要研究结果。

MICROMACHINING

Micromachining is a key technology for developing solid-state sensors, micro-actuators and mechanical micro-elements. Using silicon as a basic material, micromachining is a combination of precise etching, film growth, silicon-to-insulator and silicon-to-silicon bonding techniques, connection between layers and standard integrated circuit methods to fabricate precise three-dimensional silicon-based microstructures. Several important techniques in micromachining and our main research results are discussed in this paper.