| 用数字波面干涉仪快速检测平晶的平行度 |
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| 引用本文： | 曹利波. 用数字波面干涉仪快速检测平晶的平行度[J]. 工业计量, 2011, 21(1): 9-10 |
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| 作者姓名： | 曹利波 |
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| 作者单位： | 中国空空导弹研究院,河南洛阳,471009 |
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| 摘 要： | 文章提出了一种新的检测方法即用数字波面干涉仪检测平晶的平行度.分析了测量不确定度的来源,并对测量不确定度进行了分析评定.与传统的方法相比在保证测量准确度的前提下,大大提高了工作效率.
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| 关 键 词： | 数字波面干涉仪 平行度 不确定度 |
Quickly Measurement of Parallelism of Optical Flat with Laser Interferometer |
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| CAO Li-bo. Quickly Measurement of Parallelism of Optical Flat with Laser Interferometer[J]. Industrial Measurement, 2011, 21(1): 9-10 |
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| Authors: | CAO Li-bo |
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| Affiliation: | CAO Li-bo(China Airbone Missile Academy,Luoyang 471009,China) |
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| Abstract: | A new laser interferometer method is presented and used to quick measurement of parallelism of optical flat.Uncertainty of this method is analyzed and evaluated.Comparing with traditional method,the method can improve working efficiency. |
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| Keywords: | laser interferometer parallelism uncertainty |
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