| 微机械振动环陀螺 |
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| 引用本文： | 陈李,陈德勇,王军波.微机械振动环陀螺[J].光学精密工程,2009,17(6):1344-1351. |
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| 作者姓名： | 陈李 陈德勇 王军波 |
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| 作者单位： | 中国科学院,电子学研究所,传感技术国家重点实验室,北京,100190 |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划) |
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| 摘 要： | 为了减小振动环驱动模态和检测模态的频率差从而提高陀螺性能,提出了一种采用电磁驱动、电磁检测的全对称振动环陀螺结构。采用MEMS体硅工艺完成该微机械振动环陀螺的加工,其结构在保持镜像对称的同时,还保持了中心对称,因此整个结构高度对称,有利于减小模态频率差。为有效跟踪陀螺驱动模态的谐振频率并稳定驱动模态的幅值,设计了闭环驱动控制电路。该电路由低噪声前置放大器、相位调整环节以及自动增益放大器(VGA)组成。测试结果表明,该陀螺两个模态频率差为0.27 Hz,实现了频率较好的匹配。在±200 °/s,测得陀螺灵敏度为8.9 mV/(°/s),分辨力为0.05 °/s,非线性度为0.23%。
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| 关 键 词： | 微机械陀螺 振动环陀螺 闭环控制 |
| 收稿时间： | 2009-01-20 |
| 修稿时间： | 2009-04-30 |
Micro-machined vibrating ring gyroscope |
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| CHEN Li,CHEN De-yong,WANG Jun-bo.Micro-machined vibrating ring gyroscope[J].Optics and Precision Engineering,2009,17(6):1344-1351. |
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| Authors: | CHEN Li CHEN De-yong WANG Jun-bo |
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| Affiliation: | State Key Laboratory of Transducer Technology;Institute of Electronics;Chinese Academy of Sciences;Beijing 100190;China |
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| Abstract: | To reduce the frequency split of the drive mode and the sense mode of a vibrating ring gyroscope to improve the performance of the gyroscope,a novel symmetrical structure with electromagnetic driving and detection is proposed in this paper. The Micro-machined Vibrating Ring Gyroscope (MVRG) is fabricated in centro-symmetric and mirror-symmetric micro structures by MEMS bulk silicon processing with (100) oriented single-crystal silicon,which is conductive to reducing the frequency split. A closed-loop contro... |
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| Keywords: | micro-machined gyroscope vibrating ring gyroscope closed-loop control |
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