| 纳米金属颗粒－绝缘体膜制备的研究 |
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| 引用本文： | 赵子强,韦伦存,王浩,钟运成,卢希庭.纳米金属颗粒－绝缘体膜制备的研究[J].功能材料,1996(6). |
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| 作者姓名： | 赵子强 韦伦存 王浩 钟运成 卢希庭 |
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| 作者单位： | 北京大学技术物理系重离子物理研究所 |
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| 基金项目： | 国家自然科学基金,优秀青年教师基金 |
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| 摘 要： | 本文介绍了一台利用磁控溅射产生金属团簇，同时蒸发绝缘介质得到金属颗粒－绝缘体包埋团簇的设备，并利用该设备成功地制备出了Ｃｕ：ＣａＦ２和Ｔｉ：ＣａＦ２等金属颗粒膜。该设备适应性广，可产生几乎所有固体金属和半导体团簇。从而可以得到众多组合的功能膜。包埋在绝缘体中的团簇大小在１０ｎｍ－７０ｎｍ之间，为多晶结构；基质ＣａＦ２也为多晶
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| 关 键 词： | 包埋团簇 晶体结构 |
Study on Preparation of the Nano Grain Metal insulator Film |
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| Zhao Ziqiang,Wei Luncun,Wang Hao,Zhong Yuncheng,Lu Xiting.Study on Preparation of the Nano Grain Metal insulator Film[J].Journal of Functional Materials,1996(6). |
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| Authors: | Zhao Ziqiang Wei Luncun Wang Hao Zhong Yuncheng Lu Xiting |
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| Abstract: | A machine,using magnetic controll sputtering atom and evaporating insulator medium,is introduced.With this machine,several kinds of nano grain metal insulator films,such as Cu:CaF 2 and Ti:CaF 2 films,have been successfully prepared.This machine is suitable for almost all kinds of solid metal and semiconductor clusters.And with it,many kinds of function film series can be prepared.The size of cluster embedded in insulator is from 10nm to 70nm.The Cu cluster and CaF 2 medium are both polycrystalline structures. |
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| Keywords: | embedded cluster crystalline structure |
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