Mechanical integrity evaluation of low-k device with bump shear |
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Authors: | Peng Su Jie-Hua Zhao Scott Pozder David Wontor |
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Affiliation: | (1) Freescale Semiconductor, Inc., 6501 West William Cannon Drive, 78735 Austin, TX |
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Abstract: | The mechanical integrity of low-k dielectric films has brought many process challenges in both front-end integration and back-end
assembly, mostly due to possible interfacial delamination and fractures within the low-k films. From a packaging point of
view, it is important to have an assessment of the integrity of the low-k stack before the device is fully assembled and the
time-consuming full package evaluation is started. Some of the methods that are presently used to evaluate devices with low-k
films either do not reflect the real stress situation in a package (such as 4-point bend), or introduce a mixed die-solder
failure mode (such as die pull), which makes the results hard to interpret. In this paper, an evaluation method using solder
bump shear is introduced. The solder joints are electroplated with a Cu stud as part of the under bump metallization. When
the testing parameters are carefully optimized, bump shear can induce a failure in the low-k stack. By analyzing the maximum
load of the shear test and the characteristics of the load curves, die with different interlayer dielectric materials and
locations on the die with different interconnect metal densities can be effectively differentiated. A finite-element model
is established and fracture mechanics methodologies are utilized to interpret the results of the bump shear. |
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Keywords: | Bump shear low-k integration finite element |
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