| 基于流固耦合模型的微超声传感器仿真分析 |
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| 引用本文： | 张慧,宋光德,靳世久,官志坚,刘娟.基于流固耦合模型的微超声传感器仿真分析[J].传感器与微系统,2010,29(12). |
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| 作者姓名： | 张慧 宋光德 靳世久 官志坚 刘娟 |
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| 作者单位： | 天津大学精密测试技术及仪器国家重点实验室; |
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| 摘 要： | 建立了基于流体固体耦合单元的电容式微超声传感器(cMUT)的有限元模型,通过对模型进行
声场仿真分析,研究传感器阵列在不同介质中工作时的声场特性,如,谐振频率,发射声压等;分析了传感
器振动膜半径、空腔厚度以及传感器单元间距的变化对其发射声压幅值和带宽的影响.仿真分析的结果
表明:增大传感器的发射声压带宽,可以通过增大振动膜半径、减小空腔厚度或者减小传感器阵列中单元
的距离来实现。
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| 关 键 词： | 电容式微超声传感器 流体固体耦合 声压 |
Simulation analysis of micromachined ultrasonic transducer based on fluid-solid coupling model |
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| ZHANG Hui,SONG Guang-de,JIN Shi-jiu,GUAN Zhi-jian,LIU Juan.Simulation analysis of micromachined ultrasonic transducer based on fluid-solid coupling model[J].Transducer and Microsystem Technology,2010,29(12). |
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| Authors: | ZHANG Hui SONG Guang-de JIN Shi-jiu GUAN Zhi-jian LIU Juan |
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| Affiliation: | ZHANG Hui,SONG Guang-de,JIN Shi-jiu,GUAN Zhi-jian,LIU Juan(State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China) |
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| Abstract: | A capacitive micromachined ultrasonic transducer(cMUT) based on fluid-solid coupling modelis developed by ANSYS.The acoustic characteristics of cMUT array in different medium is researched.The effect of membrane dimensions,cavity thickness,and distance change of sensor unit on transmission of sound pressure and bandwidth is also investigated.Simulation experiment results indicate that bandwidth can be increased by increasing membrane radius,decreasing gap thickness and distance of sensor unit. |
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| Keywords: | capacitive micromachined ultrasonic transducer(cMUT) fluid-solid coupling sound pressure |
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