| 压电厚膜驱动的高刚度微变形镜的制备 |
| |
| 引用本文： | 马剑强,李保庆,许晓慧,褚家如.压电厚膜驱动的高刚度微变形镜的制备[J].纳米技术与精密工程,2011,9(5):427-431. |
| |
| 作者姓名： | 马剑强 李保庆 许晓慧 褚家如 |
| |
| 作者单位： | 1. 中国科学技术大学精密机械与精密仪器系,合肥,230027
2. 江苏省电力试验研究院有限公司,南京,210036 |
| |
| 基金项目： | 安徽省自然科学基金资助项目(090412027); 中国科学技术大学青年科学基金资助项目(2090090002) |
| |
| 摘 要： | 研究制备了一种压电厚膜微变形镜,微变形镜的连续薄膜式单晶硅镜面由61单元压电厚膜致动器阵列驱动.以镜面冲程与工作频带宽为目标,对微变形镜的结构参数进行优化设计,根据优化参数采用硅微加工技术试制了61单元致动器的微变形镜.镜面、压电陶瓷与弹性支撑层厚度分别为100μm、60μm与60μm,单元间距为5mm,通光口径为40 mm.对制备的样品性能进行了测试,微变形镜在100 V电压驱动下变形量约为2.84μm,工作带宽大于10 kHz.测试结果还表明压电厚膜驱动的微变形镜拥有较高刚度,有利于提高镜面初始平面度.
|
| 关 键 词： | 微变形镜 压电厚膜 高刚度 |
Fabrication of High Rigidity Micro Deformable Mirror Based on PZT Thick-Film Actuator |
| |
| MA Jian-qiang,LI Bao-qing,XU Xiao-hui,CHU Jia-ru.Fabrication of High Rigidity Micro Deformable Mirror Based on PZT Thick-Film Actuator[J].Nanotechnology and Precision Engineering,2011,9(5):427-431. |
| |
| Authors: | MA Jian-qiang LI Bao-qing XU Xiao-hui CHU Jia-ru |
| |
| Affiliation: | MA Jian-qiang1,LI Bao-qing1,XU Xiao-hui2,CHU Jia-ru1(1.Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei 230027,China,2.Jiangsu Electric Power Research Institute Corporation Limited,Nanjing 210036,China) |
| |
| Abstract: | A PZT thick-film actuated micro deformable mirror(DM) was designed and fabricated.The continuous single-crystal silicon membrane was supported and deformed by 61-element PZT actuators.In order to improve the mirror's stroke and operating bandwidth,an optimum structural design was accomplished.According to the optimization results a micro DM based on 61-element PZT actuators was trial-fabricated using the silicon micro-machining technology.The optimized thickness of the mirror,the PZT layer and the supportin... |
| |
| Keywords: | micro deformable mirror PZT thick-film high rigidity |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
