| 纳米多孔光波导漏模共振传感器的折射率灵敏度分析(英文) |
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| 引用本文： | 张喆,祁志美.纳米多孔光波导漏模共振传感器的折射率灵敏度分析(英文)[J].纳米技术与精密工程,2011,9(5):397-401. |
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| 作者姓名： | 张喆 祁志美 |
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| 作者单位： | 中国科学院电子学研究所传感技术国家重点实验室,北京,100190 |
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| 基金项目： | 国家自然科学基金资助项目(60978042); 国家重点基础研究发展计划(973计划)资助项目(2009CB320300); 中国科学院“百人计划”择优支持项目 |
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| 摘 要： | 在玻璃基片上射频溅射50 nm厚的金膜,然后利用TiO2胶体溶液在金膜表面制备了厚度约为320 nm的TiO2纳米多孔薄膜.以此双层膜为漏模光波导芯片,构建了基于Kretschmann结构的波长调制型光波导漏模共振(LMR)传感器.利用扫描电子显微镜(SEM)观测了TiO2纳米多孔薄膜的表面和横截面形貌.实验研究了在纳米多孔光波导中给定漏模的共振波长及折射率灵敏度与入射角的依赖关系.结果表明,随着入射角的增大,共振波长逐渐蓝移,折射率灵敏度随之下降.此外,与传统的表面等离子体共振(SPR)传感器进行了对比,结果表明在相同的共振波长下,纳米多孔光波导LMR传感器折射率灵敏度大于SPR传感器.
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| 关 键 词： | 纳米多孔 漏模共振 折射率灵敏度 |
Analysis of Refractive-Index Sensitivity of Nanoporous Waveguide Based Leaky Mode Resonance Sensor |
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| ZHANG Zhe,QI Zhi-mei.Analysis of Refractive-Index Sensitivity of Nanoporous Waveguide Based Leaky Mode Resonance Sensor[J].Nanotechnology and Precision Engineering,2011,9(5):397-401. |
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| Authors: | ZHANG Zhe QI Zhi-mei |
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| Affiliation: | ZHANG Zhe,QI Zhi-mei(State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100190,China) |
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| Abstract: | Nanoporous waveguide based leaky mode resonance(LMR) sensors with Kretschmann configuration and spectral interrogation were prepared using a nanoporous TiO2 thin film of about 320 nm in thickness dip-coated on a 50 nm gold layer sputtered on the glass substrate.Surface and cross-section morphologies of the TiO2 film were examined by scanning electron microscope(SEM).The resonance wavelength and the refractive-index sensitivity for a given leaky mode in the nanoporous waveguide were investigated as a functio... |
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| Keywords: | nanoporous leaky mode resonance refractive-index sensitivity |
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