Novel capacitance-type humidity sensor based on multi-wall carbon nanotube/SiO2 composite films |
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| Authors: | Liu Xiaowei Zhao Zhengang Li Tuo Wang Xin |
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| Affiliation: | 1. Department of Microelectronics, Harbin Institute of Technology, Harbin 150001, China ;Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, M n stry of Education, Harbin 150001, China
2. Department of Microelectronics, Harbin Institute of Technology, Harbin 150001, China |
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| Abstract: | A novel capacitance-type relative humidity (RH) sensor based on multi-wall carbon nanotubc/SiO2 (MWCNTs/SiO2) composite film is reported.Details of the fabrication process,possible sensing mechanism and sensing characteristics,such as linearity and sensitivity,are described.The capacitance of the MWCNTs/SiO2 composite film shows typical concentration percolation behavior with increasing MWCNT loading.At loadings below the percolation threshold (1.842wt％),the sensor capacitance increases obviously with increasing MWCNTs.The water condensed in the MWCNTs/SiO2 layer can lower the percolation threshold and increase the sensor capacitance.The sensor with MWCNT concentration of 1 wt％ has the best properties.The sensor has a humidity sensitivity of about 673 pF/％ RH and a linearity correlation of 0.98428.The response time of the sensor to RH is about 40 s and the recovery time is about 2 s. |
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| Keywords: | carbon nanotubes humidity sensor percolation threshold capacitance-type |
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