High drive current NMOS with Si-SiGe heterostructure low electric field channel

A drive-current enhancement in NMOS with a compressively strained SiGe structure, which had been a difficult challenge for CMOS integration with strained SiGe high-hole-mobility PMOS, was successfully achieved using a Si-SiGe heterostructure low electric field channel of optimum thickness. A 4-nm-thick Si low-field-channel NMOS with a 4-nm-thick Si/sub 0.8/Ge/sub 0.2/ layer improved drive current by 10% with a 20% reduction in gate leakage current compared with Si-control, while suppressing threshold-voltage rolloff characteristic degradation, and demonstrated excellent I/sub on/--I/sub off/ characteristics of I/sub on/ = 1 mA//spl mu/m for I/sub off/ = 100 nA//spl mu/m. These results are the best in ever reported NMOS with a compressively strained SiGe structure and indicate that a Si-SiGe heterostructure low-field-channel NMOS integrated with a compressively strained SiGe channel PMOS is a promising candidate for high-speed CMOS in 65-nm node logic technology.