| 光学材料无磨料低温抛光的试验研究 |
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| 引用本文： | 刘向阳,王立江,高春甫,吴校生,刘巍娜. 光学材料无磨料低温抛光的试验研究[J]. 机械工程学报, 2002, 38(6): 47-50 |
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| 作者姓名： | 刘向阳 王立江 高春甫 吴校生 刘巍娜 |
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| 作者单位： | 吉林大学机械科学与工程学院,长春,130025 |
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| 基金项目： | 国家自然科学基金资助项目(59975043) |
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| 摘 要： | 将无磨料抛光与低温抛光结合起来,首次提出一种可获得原子级超光滑表面的新方法——无磨料低温抛光。这种新工艺可使光学材料获得Ra<1nm的原子级超光滑表面,通过大量的试验,系统研究了抛光盘水质、抛光前修盘时间、抛光压力和偏心等对已加工表面粗糙度的影响规律。结果表明,这种抛光工艺能获得原子级的超光滑表面。
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| 关 键 词： | 光学材料 无磨料 低温抛光 超光滑表面 |
| 修稿时间： | 2001-01-08 |
EXPERIMENTAL STUDY ON CRYOGENIC POLISHING OPTICAL MATERIAL WITHOUT ABRASIVE |
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| Liu Xiangyang Wang Lijiang Gao ChunfuWu Xiaosheng Liu Weina. EXPERIMENTAL STUDY ON CRYOGENIC POLISHING OPTICAL MATERIAL WITHOUT ABRASIVE[J]. Chinese Journal of Mechanical Engineering, 2002, 38(6): 47-50 |
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| Authors: | Liu Xiangyang Wang Lijiang Gao ChunfuWu Xiaosheng Liu Weina |
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| Affiliation: | Jilin University |
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| Abstract: | A process of cryogenic polishing without abrasive is proposed ,which combines abrasiveless polishing and cryogenic polishing. This new process gains super-smooth surface on optical material with angstrom dimension (Ra<1nm). By various experiments , the effects of water quality of polishing disk , time of modifying ice disk, polishing pressure and eccentricity on surface roughness are studied. Results show that this process can reach surface roughness with angstrom dimension. |
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| Keywords: | Optical material Without abrasiveCryogenic polishing Supersmooth surface |
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