| Microwave CVD Thick Diamond Film Synthesis Using CH4/H2/H2O Gas Mixtures |
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| 作者姓名： | 满卫东 汪建华 王传新 马志斌 王升高 熊礼威 |
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| 作者单位： | [1]Hubei Provincial Key Laboratory of Plasma Chemistry ＆ Advanced Materials,Wuhan Institute of Technology, Wuhan 430073, China [2]Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China |
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| 基金项目： | supported by the Key Problem-Solving Foundation of the Hubei Province Science and Technology Department with a Grant No. 2002AA105A02）, the Team of Innovation of Hubei Province Education Department （2004） and partly by the National Natural Science Foundation of China with a Grant No. 50572075Acknowledgments We thank Professor HE Chunmou for Raman analysis of the samples. |
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| 摘 要： | Thick diamond films with a thickness of up to 1.2 mm and a area of 20 cm^2 have been grown in a homemade 5 kW microwave plasma chemical vapor deposition （MPCVD） reactor using CH4/H2/H2O gas mixtures. The growth rate, radial profiles of the film thickness, diamond morphology and quality were evaluated with a range of parameters such as the substrate temperature of 700℃ to 1100℃, the fed gas composition CH4/H2 = 3.0%, H2O/H2 = 0.0%,-2.4%. They were characterized by scanning electron microscopy and Raman spectroscopy. Translucent diamond wafers have been produced without any sign of non-diamond carbon phases, Raman peak as narrow as 4.1 cm^-1. An interesting type of diamond growth instability under certain deposition conditions was observed in a form of accelerated growth of selected diamond crystallites of a very big lateral size, about 1 mm, and of a better structure compared to the rest of the film.
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| 关 键 词： | 金刚石薄膜 微波 Raman光谱 薄膜物理学 |
| 收稿时间： | 2005-06-27 |
| 修稿时间： | 2005-06-27 |
Microwave CVD Thick Diamond Film Synthesis Using CH4/H2/H2O Gas Mixtures |
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| MAN Weidong, WANG Jianhua, WANG Chuanxin, MA Zhibin, WANG Shenggao, XIONG Liwei.Microwave CVD Thick Diamond Film Synthesis Using CH4/H2/H2O Gas Mixtures[J].Plasma Science & Technology,2006,8(3):329-332. |
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| Authors: | MAN Weidong WANG Jianhua WANG Chuanxin MA Zhibin WANG Shenggao XIONG Liwei |
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| Abstract: | |
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| Keywords: | diamond film microwave Raman spectroscopy water |
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