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高亮度LED衬底材料研究
引用本文:张克华,文东辉,袁巨龙. 高亮度LED衬底材料研究[J]. 功能材料, 2009, 40(5)
作者姓名:张克华  文东辉  袁巨龙
作者单位:1. 浙江师范大学,机械工程系,浙江,金华,321004;浙江工业大学,机械制造及自动化教育部重点实验室,超精密加工研究中心,浙江,杭州,310014
2. 浙江工业大学,机械制造及自动化教育部重点实验室,超精密加工研究中心,浙江,杭州,310014
基金项目:国家自然基金资助项目(50705088)
摘    要:衬底材料作为半导体照明产业技术发展的基石,是半导体照明产业的核心,具有举足轻重的地位,直接决定了LED芯片的制造路线.高亮度LED的半导体材料体系对衬底材料提出的要求比传统的LED更为严格.村底材料表面的粗糙度、热膨胀系数、热传导系数、极性的影响、表面的加工要求以及与外延材料间晶格间不匹配数,这些因素与高亮度LED的发光效率与稳定性密切相关.重点介绍几种典型材料与外延材料的晶格匹配及其加工要求,从材料制备难易程度和衬底与外延薄膜的化学稳定性对各种衬底材料进行比较分析,并对衬底材料的应用前景进行了预测.

关 键 词:高亮度LED  半导体照明  衬底材料

Study on the substrate materials of high-brightness LED
ZHANG Ke-hua , WEN Dong-hui , YUAN Ju-long. Study on the substrate materials of high-brightness LED[J]. Journal of Functional Materials, 2009, 40(5)
Authors:ZHANG Ke-hua    WEN Dong-hui    YUAN Ju-long
Affiliation:1.Department of mechanical Engineering;Zhejiang Normal University;Jinhua 321004;China;2.MOE Key Laboratory of Mechanical Manufacture and Automation;College of Mechanical & Electrical Engineering;Zhejiang University of Technology;Ultra-precision Machining Research Center;Hangzhou 310014;China
Abstract:Substrate material was the base and core of Semiconductor lighting industrial technology development,it was played a vital role in semiconductor industrial.The LED chip manufacturing guideline was directly determined by substrate material.The requirements of Semiconductor materials system of High-brightness LED were more strictly than the traditional LED's.The lattice match constant of epitaxy materials with substrate materials',the roughness of substrate materials,the coefficient of thermal expansion,the c...
Keywords:high-brightness LED  semiconductor lighting  substrate materials  
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