| 纳米尺度金属薄膜在拉伸状态下的稳定性 |
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| 引用本文： | 郭振山,王世斌,李林安,贾海坤,门玉涛,何巍. 纳米尺度金属薄膜在拉伸状态下的稳定性[J]. 光学精密工程, 2011, 19(9): 2293-2299. DOI: 10.3788/OPE.20111909.2293 |
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| 作者姓名： | 郭振山 王世斌 李林安 贾海坤 门玉涛 何巍 |
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| 作者单位： | 天津大学力学系,天津,300072 |
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| 基金项目： | supported by the National Natural Science Foundation of China(Grant No.10732080,11072174); ICOPEN 2011 conference(No.ICOPEN115094) |
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| 摘 要： | 将薄膜和基底作为一个基本结构来研究薄膜的变形和损坏可预测纳米薄膜器件的使用寿命.本文讨论和研究了薄膜基底结构在拉伸载荷下薄膜出现的分叉和断裂的过程.用在相同厚度的PET基底上沉积不同厚度铝膜的薄膜基底结构作为试件,分别对薄膜厚度为100,150和200 nm的3种不同试件进行了拉伸加载实验,并在OLYMPUS显微镜下观...
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| 关 键 词： | 纳米薄膜 金属薄膜 分叉 断裂 拉伸 微机电系统 |
Stability of nano-scale thin metal films under tension |
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| GUO Zhen-shan,WANG Shi-bin,LI Lin-an,JIA Hai-kun,MEN Yu-tao,HE Wei. Stability of nano-scale thin metal films under tension[J]. Optics and Precision Engineering, 2011, 19(9): 2293-2299. DOI: 10.3788/OPE.20111909.2293 |
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| Authors: | GUO Zhen-shan WANG Shi-bin LI Lin-an JIA Hai-kun MEN Yu-tao HE Wei |
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| Affiliation: | GUO Zhen-shan,WANG Shi-bin*,LI Lin-an,JIA Hai-kun,MEN Yu-tao,HE Wei (Mechanics Department,Tianjin University,Tianjin 300072,China) |
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| Abstract: | This paper presents a basic structure combined with a film and a substrate to investigate the damage and deformation of thin films and to predict the life time of MEMS.The bifurcation and fracture of thin films under a tensive load were determined by an experiment where the film/substrate structure was used as the specimen.The substrate was a deposited aluminium film with different thicknesses of 100,150 and 200 nm.Then the experiment was initiated using our designed loading device.An OLYMPUS microscope was... |
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| Keywords: | nano-scale thin film metal film bifurcation fracture tension MEMS |
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