| 大面积软X射线自支撑金透射光栅的研制 |
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| 引用本文： | 邱克强,刘正坤,陈火耀,徐向东,刘颖,洪义麟,付绍军.大面积软X射线自支撑金透射光栅的研制[J].光学精密工程,2011,19(11):2589-2595. |
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| 作者姓名： | 邱克强 刘正坤 陈火耀 徐向东 刘颖 洪义麟 付绍军 |
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| 作者单位： | 中国科学技术大学国家同步辐射实验室,安徽合肥,230029 |
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| 基金项目： | 国家自然科学基金委员会-中国工程物理研究院联合基金资助项目(No.10776030) |
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| 摘 要： | 针对等离子体诊断及空间环境探测等领域对软X射线透射光栅的需要,采用全息光刻和微电镀技术制作了自支撑软X射线金透射光栅.在基底与光刻胶之间增加减反膜层以降低高反射基底引起的驻波效应对掩模槽形的影响,使用全息光刻技术获得了侧壁陡直的光栅掩模.然后,在掩模顶部镀保护层并使用反应离子刻蚀获得电镀掩模,通过改变保护层厚度来调节电...
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| 关 键 词： | 自支撑金透射光栅 全息光刻 电镀 |
Fabrication of large area self-supported gold transmission grating for soft X-ray |
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| QIU Ke-qiang,LIU Zheng-kun,CHEN Huo-yao,XU Xiang-dong,LIU Ying,HONG Yi-lin,FU Shao-jun.Fabrication of large area self-supported gold transmission grating for soft X-ray[J].Optics and Precision Engineering,2011,19(11):2589-2595. |
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| Authors: | QIU Ke-qiang LIU Zheng-kun CHEN Huo-yao XU Xiang-dong LIU Ying HONG Yi-lin FU Shao-jun |
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| Affiliation: | QIU Ke-qiang,LIU Zheng-kun,CHEN Huo-yao,XU Xiang-dong,LIU Ying,HONG Yi-lin,FU Shao-jun(National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei 230029,China) |
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| Abstract: | To meet the need of soft X-ray self-supported transmission gratings for space detecting and plasma diagnostics,self-supported gold transmission gratings were successfully fabricated with the holographic lithography and plating technology.To obtain photo-resist mask patterns with steep sidewalls,a layer of Anti-reflection Coating(ARC) was used to attenuate standing wave resulting from the substrate with high reflectivity.Then,a plating mask was obtained by coating a protective chrome on the mask and using Re... |
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| Keywords: | self-supported gold transmission grating holography lithography plating |
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