| “Isara400”超精密坐标测量机的设计与标定 |
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| 引用本文： | Henny Spaan,Ivo Widdershoven,Rilpho Donker. “Isara400”超精密坐标测量机的设计与标定[J]. 光学精密工程, 2011, 19(9): 2236-2241. DOI: 10.3788/OPE.20111909.2236 |
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| 作者姓名： | Henny Spaan Ivo Widdershoven Rilpho Donker |
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| 作者单位： | IBS Precision Engineering;Esp 201;5633AD;Eindhoven;The Netherlands; |
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| 基金项目： | Supported by Nano CMM(No.FP6-026717-2)and Production 4μ(No.FP6-2004-NI-4) |
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| 摘 要： | 介绍了Isara 400 3维超精坐标测量机标定的关键技术,包括平台标定和系统镜面台非垂直度标定.同时,提出了一种新的超精接触探针系统,给出了这种3维灵敏度探针的标定结果.
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| 关 键 词： | 纳米技术 坐标测量机 接触探针 标定 |
Design and calibration of Isara 400 ultra-precision CMM |
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| Henny Spaan,Ivo Widdershoven,Rilpho Donker. Design and calibration of Isara 400 ultra-precision CMM[J]. Optics and Precision Engineering, 2011, 19(9): 2236-2241. DOI: 10.3788/OPE.20111909.2236 |
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| Authors: | Henny Spaan Ivo Widdershoven Rilpho Donker |
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| Affiliation: | IBS Precision Engineering,Esp 201,5633AD,Eindhoven,The Netherlands |
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| Abstract: | This paper presents critical aspects of the calibration of the Isara 400 ultra-precision 3D Coordinat Measuring Machine(CMM),such as the calibration of flatness and out-of-squareness of the system's mirror table.In addition,a newly developed ultra-precision tactile probe system is described and the results of the 3D sensitivity calibration of this probe are presented. |
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| Keywords: | nanotechnology Coordinate Measuring Machine(CMM) touch probe calibration |
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