Modeling of particle removal processes in brush scrubber cleaning |
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Authors: | Yating Huang Dan Guo Xinchun Lu Jianbin Luo |
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Affiliation: | aState Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China;bCollege of Mechanical Engineering, Beijing Technology and Business University, Beijing 100037, China |
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Abstract: | A new model describing the particle removal behaviour in brush scrubber cleaning is presented. The topology and roughness asperities of brush surface are considered. There are four situations of the particles relative to the brush roughness asperities. The forces on the particles in different states are analyzed and the particle removal criteria are listed. The particles are rolling away by the combined effects of hydrodynamic drag force and elastic force in contact area or only by the hydrodynamic drag force when in the concave area between the brush nodule asperities. When the particles are embedded in the brush asperities, the particle will be removed by friction between the bush and the particle. The cleaning results are coincident with the actual process and can be used as reference for designing a higher level cleaning process. |
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Keywords: | Brush-scrub Post-CMP cleaning Particle removal Hydrodynamics |
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