晶圆测试中BIN分设置的一种应用

本文介绍了一种集成电路晶圆测试过程中自动测试设备测试程序的BIN分设置的改善方案。通过设置多个PASSBIN,巧妙地应用了自动测试设备的BIN分类功能,从晶圆测试的汇总结果中直接得到关键参数的分布规律,避免了原来需要通过分析自动测试设备记录的详细数据才能得到分布规律的情况,省去了集成电路工程晶圆需要进行二次测试才能进行分类的步骤,对缩短集成电路工程品的测试周期、加强量产产品的工艺监控、提升晶圆测试的品质具有重要意义。

Skillful application of BIN set in wafer testing

This paper introduces an improvement application for the BIN set of ATE test program in IC wafer testing.By setting multi-Pass Bins and using ATE’s Bin sort functions skillfully,key parameter profiles can be obtained directly From wafer testing total report without analyzing ATE’s detail Data log.At the meantime,The second wafer testing is not necessary for engineer IC wafer project.This plan is of great significance to shorten the test cycle of IC in engineering level,enhance process monitoring of IC in mass production level,and improve the quality of wafer testing.