| 连续CVD Nb3Sn层生长的规律及特征的研究 |
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| 引用本文： | 陈国堂,吴裕生. 连续CVD Nb3Sn层生长的规律及特征的研究[J]. 矿冶工程, 1989, 9(3): 51-55 |
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| 作者姓名： | 陈国堂 吴裕生 |
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| 作者单位： | 长沙矿冶研究院(陈国堂，吴裕生)，长沙矿冶研究院(齐志伟) |
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| 摘 要： | 本文讨论了连续CVD Nb_3Sn层沉积速率与生产速率或带速之间的关系。研究了一定工艺条件下连续CVD层厚与沉积时间的线性生长关系和过渡层厚形成的抛物线规律与Nb_3Sn层生长的特征。
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| 关 键 词： | 超导体 Nb3Sn 化学气相沉积 |
THE REGULARITIES OF GROWTH OF THE CONTINUOUS CHEMICAL VAPOR DEPOSIT (CVD) Nb_3Sn LAYER |
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| Chen Guotang Wu Yusheng Qi Zhiwei. THE REGULARITIES OF GROWTH OF THE CONTINUOUS CHEMICAL VAPOR DEPOSIT (CVD) Nb_3Sn LAYER[J]. Mining and Metallurgical Engineering, 1989, 9(3): 51-55 |
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| Authors: | Chen Guotang Wu Yusheng Qi Zhiwei |
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| Affiliation: | Changsha Research Institute of Mining and Metallurgy |
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| Abstract: | In this paper the relationship will be discussed between the deposition rate and tape rate during the continuou CVD of Nb_3Sn. A analysis will be made on the linear relationship of thickness of the continuous CVD Nb_3Sn layer to deposit time, the parabolic relationship of transitional layer thickness to deposition time, and the growth characteristics under a given deposition condition. |
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| Keywords: | Chemical vapor deposition Nb_3Sn superconductor Deposition rate |
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