| A 2× 2 SOI mach-zehnder thermo-optical switch based on strongly guided paired multimode interference couplers |
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| 作者姓名： | YANG Di WANG Yi-quan LV Mi CHEN Shao-wu YU Jin-zhong |
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| 作者单位： | [1]Institute of Physics and Engineering, Central University for Nationalities, Beijing, 100081,China. [2]State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China. |
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| 基金项目： | Supported in part by the National ＂973＂ Plan （No. G2000-03-66 and No.2006CB921702）, National Natural Science Foundation of China（N0. 10674185）.and the Science Foundation of the Central University for Nationalities （No. CUN07A） |
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| 摘 要： | A silicon-on-insulator 2× 2 Mach-Zehnder thermo-optical switch is developed based on strongly guided paired multimode interference couplers. The multimode-interference couplers were etched deeply for improving coupler characteristics such as self-imaging quality, uniformity and fabrication toierance. The proposed switch achieves good performances, including a low insertion loss of -11.0dB, a fiber-waveguide coupling loss of-4.3dB and a fast response speed measured to be 3.5 and 8.8 μs for raise and fall switching time, respectively.
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| 关 键 词： | 光学开关 干涉连接器 集成电路 多状态 |
| 文章编号： | 1673-1905（2007）05-0334-03 |
| 收稿时间： | 16 April 2007 |
| 修稿时间： | 2007-04-16 |
A 2×2 SOI Mach-Zehnder thermo-optical switch based on strongly guided paired multimode interference couplers |
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| YANG Di WANG Yi-quan LV Mi CHEN Shao-wu YU Jin-zhong.A 2× 2 SOI mach-zehnder thermo-optical switch based on strongly guided paired multimode interference couplers[J].Opto-electronics Letters,2007,3(5):334-336. |
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| Authors: | Di Yang Yi-quan Wang Mi Lv Shao-wu Chen and Jin-zhong Yu |
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| Affiliation: | (1) Institute of Physics and Engineering, Central University for Nationalities, Beijing, 100081, China;(2) State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China |
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| Abstract: | A silicon-on-insulator 2 × 2 Mach-Zehnder thermo-optical switch is developed based on strongly guided paired multimode interference
couplers. The multimode-interference couplers were etched deeply for improving coupler characteristics such as self-imaging
quality, uniformity and fabrication tolerance. The proposed switch achieves good performances, including a low insertion loss
of −11.0dB, a fiber-waveguide coupling loss of −4.3dB and a fast response speed measured to be 3.5 and 8.8 μs for raise and
fall switching time, respectively.
Supported in part by the National “973” Plan (No. G2000-03-66 and No.2006CB921702), National Natural Science Foundation of
China(NO. 10674185).and the Science Foundation of the Central University for Nationalities (No. CUN07A) |
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| Keywords: | TN256 |
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