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| 高性能PZT压电厚膜及MEMS微驱动器技术研究 | |
| 引用本文： | 曹茂盛,路冉,赵全亮,刘红梅,邱成军,袁杰. 高性能PZT压电厚膜及MEMS微驱动器技术研究[J]. 黑龙江水专学报, 2011, 2(3): 76-84 |
| 作者姓名： | 曹茂盛 路冉 赵全亮 刘红梅 邱成军 袁杰 |
| 作者单位： | 1. 北京理工大学材料学院,北京,100081 2. 黑龙江大学电子信息工程学院,哈尔滨,150080 3. 中央民族大学信息工程学院,北京,100081 |
| 基金项目： | 国家自然科学基金面上项目（50742007,50872159）;863项目（2007AAOaZ103）;声纳与水声技术国防科技重点实验室基金项目（914C24KF0901） |
| 摘 要： | 运用混合溶胶-凝胶法制备了具有钛酸铅(PT)种子层的PZT基压电复合厚膜,包括(100)取向PZT压电厚膜,PZT纳米颗粒增强PZT压电复合厚膜((0-3)PZT)和氧化锌晶须增强PZT复合厚膜(ZnOw-PZT).通过结构表征,研究了工艺条件和膜厚对PZT基厚膜的生长、结晶、取向和微结构的影响,给出最佳工艺条件.并介绍了无阀型压电MEMS微泵、Ⅴ型阀式压电MEMS微泵、压电悬臂梁和三压电悬臂驱动的悬浮膜片式MEMS微镜等微器件的性能. |
| 关 键 词： | PZT 厚膜 溶胶-凝胶法 MEMS |
High performance PZT piezoelectric thick films and micro-technology research of MEMS microactuator |
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| CAO Mao-sheng,LU Ran,ZHAO Quan-liang,LIU Hong-mei,QIU Cheng-jun,YUAN Jie. High performance PZT piezoelectric thick films and micro-technology research of MEMS microactuator[J]. Journal of Heilongjiang Hydraulic Engineering College, 2011, 2(3): 76-84 | |
| Authors: | CAO Mao-sheng LU Ran ZHAO Quan-liang LIU Hong-mei QIU Cheng-jun YUAN Jie |
| Affiliation: | 1. Department of Material of Sciences and Engineering, Beijing Institute of Technology, Beijing 100081, China; 2 Department of Electronic Engineering, Heilongjiang University, Harbin 150080, China; 3. Center University for Nationality, School of Information Engineering, Beijing 100081, China) |
| Abstract: | PZT-based thick films with lead titanate seed layer, including PZT, PZT thick films embedded with PZT nanopartieles and PZT thick films embedded with zinc oxide nanowhiskers （ZnO,,-PZT） are prepared by hybrid sol-gel route. The effects of process conditions and thickness on the crystalline orientation, micro-structure and surface morphology are investigated by structure characterized. The best technical conditions have been obtained. And the properties and feature of the valve-less PZT micro-pump, V type valve micro-actuator, MEMS silicon micro-cantilever and MEMS micro-mirror actuated by three piezoelectric cantilevers are introduced. |
| Keywords: | PZT Thick films Sol-gel MEMS |
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