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| 烧结式微热管的工质灌注、抽真空与封接 | |
| 引用本文： | 李西兵,郭建华,王世刚,石志民,姜辉,娄晓钟,张红霞.烧结式微热管的工质灌注、抽真空与封接[J].真空科学与技术学报,2011,31(2):187-193. |
| 作者姓名： | 李西兵 郭建华 王世刚 石志民 姜辉 娄晓钟 张红霞 |
| 作者单位： | 1. 齐重数控装备股份有限公司,齐齐哈尔161005;齐齐哈尔大学机电工程学院,齐齐哈尔,161006;哈尔滨理工大学机械动力工程学院,哈尔滨,150080 2. 齐齐哈尔大学机电工程学院,齐齐哈尔,161006 3. 齐重数控装备股份有限公司,齐齐哈尔,161005 |
| 基金项目： | 国家自然科学基金项目(51075218); 黑龙江省自然科学基金项目(E200909); 黑龙江省博士后资助经费资助项目(LBH-Z10006) |
| 摘 要： | 目前微电子与光电子芯片对散热要求日益增高,烧结式微热管已经成为其理想的散热元件,对微热管进行快速抽真空,使微热管中的工质量与真空度符合要求,是决定其制造质量与成本的重要因素。通过对微热管的工作原理及其抽真空-工质灌注-冷焊的制造方法进行分析,提出一种分别采用工质冻结-抽真空-冷焊法与二次除气-冷焊法对烧结式微热管进行抽真空的方法。大量的实验表明,采用所提出的制造方法不仅可以保证微热管中工质量与真空度达到要求,而且抽真空的时间大约比原有方法节省了2/3,具有很好的传热性能。 |
| 关 键 词： | 烧结式微热管 抽真空 工质灌注 工质冻结 冷焊 二次除气 |
Vacuum Technologies in Fabricating Micro Heat Pipe with Sintered Wick |
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| Li Xibing,Guo Jianhua,Wang Shigang,Shi Zhimin,Jiang Hui,Lou Xiaozhong,Zhang Hongxia.Vacuum Technologies in Fabricating Micro Heat Pipe with Sintered Wick[J].JOurnal of Vacuum Science and Technology,2011,31(2):187-193. | |
| Authors: | Li Xibing Guo Jianhua Wang Shigang Shi Zhimin Jiang Hui Lou Xiaozhong Zhang Hongxia |
| Affiliation: | Li Xibing1,2,3,Guo Jianhua2,Wang Shigang2,Shi Zhimin1,Jiang Hui1,Lou Xiaozhong1,Zhang Hongxia2(1.Qiqihar CNC Equipment Corp.Ltd.,Qiqihar 161005,China,2.School of Mechatronics Engineering,Qiqihar University,Qiqihar 161006,3.Department of Mechanical and Power Engineering,Harbin University of Science and Technology,Harbin 150080,China) |
| Abstract: | A novel technique has been successfully developed to fabricate the micro heat pipe with sintered wick,recently widely used as highly efficient heat-sink in manufacturing microelectronic and optoelectronic chips.In the technique,the injected working fluid was first frozen;next,degassing was done by rapidly pumping the pressure down to below 110 Pa;and finally,the micro heat pipe was crimping sealed,followed by secondary degassing and crimping sealing.The field tests on industrial scale show that the micro he... |
| Keywords: | Micro heat pipe with sintered wick Vacuum-pumping Working fluid perfusing Working fluid freezing Crimping seal Secondary deaeration |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |