| 醋酸对绒面AZO薄膜表面织构均匀性的影响研究 |
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| 引用本文： | 薛进奎,王海燕,王新星,张家朝,穆慧慧,姚宁,李双阳,王星雨. 醋酸对绒面AZO薄膜表面织构均匀性的影响研究[J]. 真空, 2011, 48(2) |
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| 作者姓名： | 薛进奎 王海燕 王新星 张家朝 穆慧慧 姚宁 李双阳 王星雨 |
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| 作者单位： | 郑州大学物理工程学院材料物理教育部重点实验室,河南,郑州,450052 |
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| 基金项目： | 河南省科技厅攻关项目(编号:082102230010) |
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| 摘 要： | 以0.5%的稀盐酸中加入一定量醋酸后的溶液为腐蚀液,对利用直流磁控溅射方法制备的平面掺铝氧化锌(AZO)薄膜进行表面织构,并对加入醋酸后的AZO薄膜表面织构均匀性和反应机理进行研究。结果表明:在0.5%稀盐酸中所加醋酸量与盐酸体积比为0.5:1时,对平面AZO薄膜腐蚀45 s能获得更均匀陨石坑状绒面结构,且有较高绒度;腐蚀液中较水分子大得多的醋酸分子的空间位阻作用在一定程度上能减缓腐蚀速率,使得比加醋酸前获得的AZO薄膜绒面更均匀。
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| 关 键 词： | 直流磁控溅射 绒面AZO薄膜 表面织构 绒度 均匀性 |
Effects of the acetic acid on the surface texture uniformity of textured AZO film |
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| XUE Jin-kui,WANG Hai-yan,WANG Xin-xing,ZHANG Jia-chao,MU Hui-hui,YAO Ning,LI Shuang-yang,WANG Xing-yu. Effects of the acetic acid on the surface texture uniformity of textured AZO film[J]. Vacuum(China), 2011, 48(2) |
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| Authors: | XUE Jin-kui WANG Hai-yan WANG Xin-xing ZHANG Jia-chao MU Hui-hui YAO Ning LI Shuang-yang WANG Xing-yu |
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| Affiliation: | XUE Jin-kui,WANG Hai-yan,WANG Xin-xing,ZHANG Jia-chao,MU Hui-hui,YAO Ning,LI Shuang-yang,WANG Xing-yu(Material Physics Laboratory MOE China and Department of Physics,Zhengzhou University,Zhengzhou 450052,China) |
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| Abstract: | The smooth Al-doped zinc oxide(AZO) transparent conductive films prepared by DC-magnetron sputtering technique were textured by the mixed etching solution made by adding a certain amount of acetic acid into the 0.5% dilute HCl.The surface texture uniformity and reaction mechanism of AZO films was investigated after adding acetic acid.The results showed that when the volume ratio of added acetic acid to 0.5% dilute HCl is 0.5:1 and etching time is 45s,the smooth AZO film can obtain more uniform crater shape ... |
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| Keywords: | DC-magnetron sputtering textured AZO film surface texture haze uniformity |
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