| 四极质谱计工作参数对校准因子影响研究 |
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| 引用本文： | 陈联,陈光奇,邱家稳,孙冬花. 四极质谱计工作参数对校准因子影响研究[J]. 真空, 2011, 48(2) |
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| 作者姓名： | 陈联 陈光奇 邱家稳 孙冬花 |
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| 作者单位： | 兰州物理研究所,真空低温技术与物理重点实验室,甘肃,兰州,730000 |
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| 摘 要： | 介绍了在危险气体成份分析系统校准装置上,开展四极质谱计工作参数对校准因子影响的实验研究工作。在实验中,每次改变四极质谱计的一个工作参数,如电子能量、离子能量、发射电流、分辨本领、扫描速度、收集方式等,测量氮谱峰离子流强度和被校气体谱峰离子流强度,利用校准因子计算公式,通过计算获得校准因子值,并分析校准因子的变化趋势,给出四极质谱计实验室校准参数设置,减小校准不确定度。
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| 关 键 词： | 质谱分析 校准因子 四极质谱计 危险气体 |
Effects of working parameters of quadrupole mass spectrometer on calibration factor |
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| CHEN Lian,CHEN Guang-qi,QIU Jia-wen,SUN Dong-hua. Effects of working parameters of quadrupole mass spectrometer on calibration factor[J]. Vacuum(China), 2011, 48(2) |
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| Authors: | CHEN Lian CHEN Guang-qi QIU Jia-wen SUN Dong-hua |
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| Affiliation: | CHEN Lian,CHEN Guang-qi,QIU Jia-wen,SUN Dong-hua(Laboratory of Vacuum & Cryogenics Technology and Physics,Lanzhou Institute of Physics,Lanzhou 730000,China) |
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| Abstract: | The effects of working parameters of a quadrupole mass spectrometer(QMS) on calibration factor were investigated experimentally on a calibrator for the analysis system of dangerous gas composition.The working parameters include electron voltage,ion field voltage,emission current,resolution capability,scanning speed,collecsting mode,etc.,and one of them should be changed once when conducting an experiment.In such a way the peak intensity of ion current on the spectra of both nitrogen gas and the gas to be ca... |
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| Keywords: | mass spectrometer analysis calibration factor QMS dangerous gas |
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