| 真空沉积掺杂制备PARYLENE功能薄膜研究 |
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| 引用本文： | 何庆,刘景全,杨春生,李以贵,芮岳峰. 真空沉积掺杂制备PARYLENE功能薄膜研究[J]. 真空, 2011, 48(1) |
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| 作者姓名： | 何庆 刘景全 杨春生 李以贵 芮岳峰 |
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| 作者单位： | 上海交通大学微纳科学技术研究院,微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海200240 |
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| 基金项目： | 国家自然科学基金(60876082); 上海市科委纳米专项(0852nm06600); 上海市教委曙光计划(08SG13); 航空科学基金(2008ZE57019) |
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| 摘 要： | 本文介绍了高分子材料PARYLENE的真空沉积机理及其优越性和不足。提出了一种在PARYLENE真空沉积过程中引入机械掺杂制备具有特定功能的PARYLENE高分子薄膜的方法并给出了掺杂试验设备设计方案。最后提出了影响机械粉体掺杂效果的几个因素。
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| 关 键 词： | Parylene 真空沉积 干法掺杂 纳米粉体 |
Study on preparation of nanopowder-doped PARYLENE functional films in vacuum |
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| HE Qing,LIU Jing-quan,YANG Chun-sheng,LI Yi-gui,RUI Yue-feng. Study on preparation of nanopowder-doped PARYLENE functional films in vacuum[J]. Vacuum(China), 2011, 48(1) |
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| Authors: | HE Qing LIU Jing-quan YANG Chun-sheng LI Yi-gui RUI Yue-feng |
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| Affiliation: | HE Qing,LIU Jing-quan,YANG Chun-sheng,LI Yi-gui,RUI Yue-feng(National Key Laboratory of Nano / Micro Fabrication Technology,Key Laboratory for Thin Film andMicrofabrication of Ministry of Education,Institute of Mico and Nano science and Technology,ShanghaiJiaotong University,Shanghai 200240,China) |
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| Abstract: | Describing the advantages of the polymer PARYLENE films and disadvantages of their deposition process invacuum,a modified deposition method was proposed where the SiO2 and TiO2 nanopowder was doped into the films with aspecially designed centrifugal mechanism introduced in the preparation to enhance the films' resistance to heat and ultraviolet light.With the design of the mechanical doping setup expounded,some influencing factors on the result of mechanical nanopowder doping process were discussed. |
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| Keywords: | parylene vacuum deposition dry doping nanopowder |
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