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A Digital Deformation Vacuum Gauge with an LC-Generator
Authors:Korolev  I A  Alekseenko  N N  Porodnov  B T  Sapunov  V A  Savel'ev  D V
Abstract:The design of a sylphon bellows sensor and the basic circuits of an LC-generator and of a microprocessor unit are presented. An analytical pressure–frequency conversion function and a special method of adjusting the sensor ensure an error of less than 0.05%. The dynamic range is up to 105. The instruments developed cover the ranges 103, 104, and 105 Pa.
Keywords:sylphon bellows sensor  LC-generator  pressure–  frequency conversion
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